THU PHYS

•  SPM
•  Photolumin
•  Sputtering System
•  CVD
•  Impedance Analyzer
•  Elechemical System
•  Optical Microscope
•  Polisher
•  FDTD Simulation
• software
•  Raman Spectrum
•  Others

Sputtering Sysyem

Manager：吳易達 E-mail：dcloud25@hotmail.com

Introduction：

Gun type： Three guns，DC and RF

Target：Cu, Cr, Ti, Au, Co, Fe, TiO2，Diameter:2"

Heater：Model:PXR4，maximum 600℃

Achievement：

RF Sputtering using 70W for 10 minutes at 200℃

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©Nano-optoelectrionics Lab, THU Phys

Address:No.1727, Sec.4, Taiwan Boulevard, Xitun District, Taichung City 407224, Taiwan R.O.C.

TEL：+886-4-23590121 # 32148

Location：510, General Sciences Building(BS510), THU